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New Plasma Sources for PE CVD
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2003 (English)In: Invited paper, 1st Int Symposium on Design and Technology of Coatings, Bonassola, Italy September 24-26, Proc ed by E Olzi and R Molena, ISBN 88-8080-046-9, 2003Conference paper, Published paper (Refereed)
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2003.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-47580OAI: oai:DiVA.org:uu-47580DiVA: diva2:75487
Available from: 2007-02-22 Created: 2007-02-22

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Barankova, HanaBardos, Ladislav

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