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Micro-coil heater for improved performance in cold/hot gas microthrusters in silicon
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. ÅSTC.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. ÅSTC.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. ÅSTC.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. ÅSTC.
2003 (English)In: Power MEMS 2003, Makuhari, Japan, 2003, 55-56 p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2003. 55-56 p.
Identifiers
URN: urn:nbn:se:uu:diva-47672OAI: oai:DiVA.org:uu-47672DiVA: diva2:75579
Available from: 2007-01-16 Created: 2007-01-16

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