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Metal Silicides in Advanced CMOS Technology
2014 (English)In: Metallic films: structure, processing and properties / [ed] Katayun Barmak and Kevin Coffey, UK: Woodhead Publishing Limited, 2014Chapter in book (Other academic)
Place, publisher, year, edition, pages
UK: Woodhead Publishing Limited, 2014.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-235239OAI: oai:DiVA.org:uu-235239DiVA: diva2:759504
Available from: 2014-10-30 Created: 2014-10-30 Last updated: 2014-10-30

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CiteExportLink to record
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