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Transfer of micro-optical structures into GaAs and diamond
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
2001 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2001. Vol. 4561, 114-122 p.114-122 p.
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:uu:diva-48108DOI: 10.1117/12.443080OAI: oai:DiVA.org:uu-48108DiVA: diva2:76015
Conference
Proceedings of the society of photo-optical instrumentation engineers (SPIE), Conference on MOEMS and Miniaturized Systems II, October 22-24, 2001, San Francisco, CA, USA
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2016-04-20

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Karlsson, MikaelNikolajeff, Fredrik

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