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Microstructural features of Al-implanted 4H-SiC
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. ION PHYSIC.
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2003 (English)Article in journal (Refereed) Published
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URN: urn:nbn:se:uu:diva-48495OAI: oai:DiVA.org:uu-48495DiVA: diva2:76401
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-13

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