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HYDROPHILIC-SUPERHYDROPHOBIC PATTERNED SURFACE FOR PARALLEL MICROASSEMBLY
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Aalto University, Finland.
Aalto University, Finland.
2014 (English)In: Technical Digest of the 25th Micromechanics and Microsystems Europe Conference (MME 2014), Istanbul, Turkey, 2014, 2014Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

In  this  paper,  a  hydrophilic-superhydrophobic  patterned  surface  is  investigated for parallel microassembly of 200 µm × 200 µm chips with receptor sites of the same dimensions, allowing for correction of significant error as compared to the state-of-the-art.  The  hydrophilic-superhydrophobic pattered surface consists of 200 µm × 200 µm silicondioxide  receptor  sites  with  black  silicon  substrate coated  with  fluorocarbon  polymer.  The  measured contact  angle  of  water  on  the  silicon  dioxide  padsand the background are 50° and 170°, respectively.The  water  mist-induced  hybrid  microassembly technique  is  used  to  carry  out  the  experimental studies  on  hydrophilic-superhydrophobic  pattered surface  for  parallel  microassembly.  The  experimental results show that the parallel microassembly of  chips  can  not  only  be  achieved  on  hydrophilic-superhydrophobic  patterned  surface,  but  also demonstrate  significant  error  correction  capability. With extreme large initial placement error,  where achip  is  placed  next  to  a receptor  site  and  has  zero overlapping  with  the  receptor  site,  the  chip  is  still able to align with the receptor site. The results also indicate  that  the  reliability  of  the  microassembly process  can  be  greatly  enhanced  using  hydrophilic patterns with super-hydrophobic background.

Place, publisher, year, edition, pages
2014.
Keyword [en]
Parallel microassembly, Hydrophilic-hydrophobic patterned surface, Self-alignment
National Category
Nano Technology Other Physics Topics Robotics
Research subject
Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Nanotechnology and Functional Materials
Identifiers
URN: urn:nbn:se:uu:diva-237150OAI: oai:DiVA.org:uu-237150DiVA: diva2:766666
Conference
25th Micromechanics and Microsystems Europe workshop
Available from: 2014-11-28 Created: 2014-11-28 Last updated: 2016-04-22

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Chang, BoHjort, Klas

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