Thermomechanical behaviour and pressure sensing of ceramic wireless devices for high-temperature environments
2014 (English)Conference paper, Abstract (Refereed)
This paper reports on the design, fabrication and thermomechanical characterization of wirelessceramic devices, one with an integrated pressure sensor element. The project aims at developingmicrosystems for sensing in harsh environments where conventional electronic devices are restrained.Here, the devices are LC resonating circuits made from High-Temperature Co-fired Ceramic (HTCC)aluminium oxide green tapes. For the fabrication, the tapes were screen-printed with platinum paste,micromachined, stacked, laminated and fired. The additional sensor element was made from the samematerial and with the same processes, and contains a cavity sealed with a capacitive membrane.Thermomechanical characterization was made by investigating the bimorphic behaviour due to CTEmismatch as well as the resonance frequency of the devices as a function of mechanical displacement.Also, the resonance frequency as a function of pressure was demonstrated for the device with anintegrated pressure sensor node. The wireless readings were performed with a tuneable resonating loopantenna. The devices showed a relatively low quality factor value. The bimorphic behaviour is lowwith only small variations for temperatures up to 400°C. As for the mechanical displacement, theresonance frequency was only affected for thin devices at forced deformations that were larger thanthose observed as a function of temperature. For the device with an integrated pressure sensor, a clearpressure-induced frequency shift of 6785 ppm was observed at 1.5 bar. This indicates that the devicesare robust for high temperatures and also applicable for pressure readings. Future work will furtherexpand on high-temperature characterization of the devices.
Place, publisher, year, edition, pages
2014. 75-80 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-239426OAI: oai:DiVA.org:uu-239426DiVA: diva2:774497
The 10th Micronano System Workshop (MSW 2014), 2014, Uppsala, Sweden