uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Manufacturing Miniature Langmuir probes by Fusing Platinum Bond Wires
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (Ångström Space Technology Centre (ÅSTC))ORCID iD: 0000-0003-0832-1848
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Swedish Defence University. (ÅSTC)ORCID iD: 0000-0002-0501-0887
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
2015 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, no 10, 105012Article in journal (Refereed) Published
Abstract [en]

This paper reports on a novel method for manufacturing microscopic Langmuir probes with spherical tips from platinum bond wires for plasma characterization in microplasma sources by fusing. Here, the resulting endpoints, formed by droplets of a fused wire, are intended to act as a spherical Langmuir probe. For studying the fusing behavior, bond wires were wedge-bonded over a 2 mm wide slit, to emulate the final application, and fused at different currents and voltages. For electrical isolation, a set of wires were coated with a 4 µm thick layer of Parylene before they were fused. After fusing, the gap size, as well as the shape and area of the ends of the remaining stubs were measured. The yield of the process was also investigated, and the fusing event was studied using a high-speed camera for analyzing the dynamics of fusing. Four characteristic tip shapes were observed: spherical, semi-spherical, serpentine shaped and folded. The stub length leveled out at ~420µm. The fusing of the coated wires required a higher power for attaining a spherical shape. Finally, a Parylene coated bond wire was integrated into a stripline split-ring resonator (SSRR) microplasma source, and fused to form two Langmuir probes with spherical endpoints. These probes were used for measuring the I-V characteristics of a plasma generated by the SSRR. In a voltage range between -60 V and 60 V, the fused stubs exhibited the expected behavior of spherical Langmuir probes and will be considered for future integration.

Place, publisher, year, edition, pages
2015. Vol. 25, no 10, 105012
Keyword [en]
Langmuir probe; bond wire; fusing; microplasma source
National Category
Physical Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-251306DOI: 10.1088/0960-1317/25/10/105012ISI: 000366827400028OAI: oai:DiVA.org:uu-251306DiVA: diva2:805315
Funder
Swedish National Space BoardKnut and Alice Wallenberg Foundation
Available from: 2015-04-15 Created: 2015-04-15 Last updated: 2017-12-04Bibliographically approved
In thesis
1. Miniature Plasma Sources for High-Precision Molecular Spectroscopy in Planetary Exploration
Open this publication in new window or tab >>Miniature Plasma Sources for High-Precision Molecular Spectroscopy in Planetary Exploration
2015 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

The prospect of finding life outside Earth has fascinated mankind for ages, and new technology continuously pushes the boundary of how remote and how obscure evidence we can find. Employing smaller, or completely new, types of landers and robots, and equipping them with miniature instruments would indeed revolutionize exploration of other planets and moons.

In this thesis, microsystems technology is used to create a miniature high-precision isotope-resolving molecular spectrometer utilizing the optogalvanic effect. The heart of the instrument, as well as this thesis, is a microplasma source.

The plasma source is a split-ring resonator, chosen for its simplicity, pressure range and easily accessible plasma, and modified to fit the challenging application, e.g., by the adding of an additional ground plane for improved electromagnetic shielding, and the integration of microscopic plasma probes to extract the pristine optogalvanic signal.

Plasma sources of this kind have been manufactured in both printed circuit board and alumina, the latter for its chemical inertness and for compatibility with other devices in a total analysis system. From previous studies, classical optogalvanic spectroscopy (OGS), although being very sensitive, is known to suffer from stability and reproducibility issues. In this thesis several studies were conducted to investigate and improve these shortcomings, and to improve the signal-to-noise ratio. Moreover, extensive work was put into understanding the underlying physics of the technique.

The plasma sources developed here, are the first ever miniature devices to be used in OGS, and exhibits several benefits compared to traditional solutions. Furthermore, it has been confirmed that OGS scales well with miniaturization. For example, the signal strength does not decrease as the volume is reduced like in regular absorption spectroscopy. Moreover, the stability and reproducibility are greatly increased, in some cases as much as by two orders of magnitude, compared with recent studies made on a classical OGS setup. The signal-to-noise ratio has also been greatly improved, e.g., by enclosing the sample cell and by biasing the plasma. Another benefit of a miniature sample cell is the miniscule amount of sample it requires, which can be important in many applications where only small amounts of sample are available.

To conclude: With this work, an important step toward a miniature, yet highly performing, instrument for detection of extraterrestrial life, has been taken.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2015. 53 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1253
Keyword
MEMS, MST, Optogalvanic Spectroscopy, Molecular Spectroscopy, Split-Ring Resonator, Microplasma
National Category
Physical Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
urn:nbn:se:uu:diva-251315 (URN)978-91-554-9245-8 (ISBN)
Public defence
2015-06-05, Polhemsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 13:15 (English)
Opponent
Supervisors
Available from: 2015-05-11 Created: 2015-04-15 Last updated: 2015-07-07

Open Access in DiVA

fulltext(4099 kB)132 downloads
File information
File name FULLTEXT02.pdfFile size 4099 kBChecksum SHA-512
a0e169f2abcea94ac8f11a7929f28c17715ad7e212f65fbc2a7c3bc46ca2c7c58f66b7d47ca66e653039270c43e752cf663e9509143c6ca31d864f0188ad65a3
Type fulltextMimetype application/pdf

Other links

Publisher's full text

Authority records BETA

Berglund, MartinSturesson, PeterThornell, GregerPersson, Anders

Search in DiVA

By author/editor
Berglund, MartinSturesson, PeterThornell, GregerPersson, Anders
By organisation
Microsystems Technology
In the same journal
Journal of Micromechanics and Microengineering
Physical SciencesEngineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
Total: 132 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 1365 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf