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Inversion in Metal–Oxide–Semiconductor Capacitors on Boron-Doped Diamond
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity. (Division of Electricity)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (MSL)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity. (Division of Electricity)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity. (Division of Electricity)
2015 (English)In: IEEE Electron Device Letters, ISSN 0741-3106, E-ISSN 1558-0563, Vol. 36, no 6, 603-605 p.Article in journal (Refereed) Published
Abstract [en]

For the advancement of diamond-based electronic devices, the fabrication of metal-oxide-semiconductor field-effect transistors (MOSFETs) is crucial, as this device finds applications in numerous fields of power electronics and high-frequency systems. The MOS capacitor forms the basic building block of the MOSFET. In this letter, we describe planar MOS capacitor structures fabricated with atomic layer deposited aluminum oxide as the dielectric on oxygen-terminated boron-doped diamond substrates with different doping levels. Using capacitance-voltage measurements, we have, for the first time, observed inversion behavior in MOS structures on boron-doped diamond, with a doping concentration of 4.1 × 1019/cm3.

Place, publisher, year, edition, pages
2015. Vol. 36, no 6, 603-605 p.
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Electronics; Engineering Science with specialization in Science of Electricity
Identifiers
URN: urn:nbn:se:uu:diva-253954DOI: 10.1109/LED.2015.2423971ISI: 000355252300025OAI: oai:DiVA.org:uu-253954DiVA: diva2:816774
Available from: 2015-06-04 Created: 2015-06-04 Last updated: 2017-12-04Bibliographically approved

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Kovi, Kiran KumarVallin, ÖrjanMajdi, SamanIsberg, Jan

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