uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Suppression of Transverse-mode Spurious Responses in Thin Film Lamb Wave Resonators by Bandgap Engineering
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2014 (English)In: 2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2014, 2552-2555 p.Conference paper, Published paper (Refereed)
Abstract [en]

Thin film S0 mode Lamb wave resonators with reduced spurious transverse-mode responses are designed, fabricated and evaluated. The proposed solution consists of a higher velocity busbar topology which improves the waveguiding under the active part of the resonator. To suppress the spurious responses a narrow matching layer is introduced between the busbar and the active part of the resonator. 3D finite element analysis was initially used to verify the approach. Both eigen-frequency and frequency response analyses were used to reveal the physics of the waveguiding and the energy confinement effects in the proposed topology. Finally, measurements of S0 Lamb wave resonators have confirmed the efficient suppression of the spurious transverse modes. The proposed technique can successfully be employed also in S0 Lamb wave resonators with suspended edges (referred by some authors also as contour-mode resonators), while eliminating the need of tethers thus improving the heat dissipation.

Place, publisher, year, edition, pages
2014. 2552-2555 p.
Keyword [en]
Lamb wave, Resonator, AlN, Stopband, CMR
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-257129DOI: 10.1109/ULTSYM.2014.0637ISI: 000352792500635ISBN: 978-1-4799-7049-0 (print)OAI: oai:DiVA.org:uu-257129DiVA: diva2:831339
Conference
IEEE International Ultrasonics Symposium (IUS), SEP 03-06, 2014, Chicago, IL
Available from: 2015-06-30 Created: 2015-06-30 Last updated: 2015-06-30Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text
By organisation
Solid State Electronics
Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 693 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf