Microacoustic in-liquid sensors based on thin AlN films: A comparative study
2014 (English)In: 2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2014, 659-662 p.Conference paper (Refereed)
We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.
Place, publisher, year, edition, pages
2014. 659-662 p.
QS-FBAR vs S-0-LWR, Liquid, Sensing mechanism, Viscosity and density, FEA
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:uu:diva-257127DOI: 10.1109/ULTSYM.2014.0162ISI: 000352792500162ISBN: 978-1-4799-7049-0OAI: oai:DiVA.org:uu-257127DiVA: diva2:831678
IEEE International Ultrasonics Symposium (IUS), SEP 03-06, 2014, Chicago, IL