Complete Bandgap SAW Phononic Resonant Topologies
2014 (English)In: 2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2014, 475-478 p.Conference paper (Refereed)
Resonant surface acoustic wave (SAW) structures employing 2D phononic gratings with hexagonal symmetry are micro-fabricated and tested in a proof of principle study. The proposed structures have the advantage of being compatible with the planar SAW technology, while ensuring operation within the complete frequency bandgap of the phononic grating. More specifically, 2D phononic gratings exhibiting a complete frequency bandgap are employed in the design of three distinct types of resonant test structures. The proposed test structures are fabricated on to a 128 degrees YX LiNbO3 substrate by means of low resolution photolithography. Frequency response measurements of the SAW phononic resonators confirmed operation within the complete frequency bandgap of each grating structure. The experimental results obtained demonstrate that surface phononic gratings can be successfully used in the design of SAW resonators. The proposed research paves the way for subsequent implementation of the phononic bandgap technology in high performance micro-acoustic RF components.
Place, publisher, year, edition, pages
2014. 475-478 p.
SAW, Phononic, Resonator, RF, Grating
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:uu:diva-257126DOI: 10.1109/ULTSYM.2014.0118ISI: 000352792500118ISBN: 978-1-4799-7049-0OAI: oai:DiVA.org:uu-257126DiVA: diva2:832380
IEEE International Ultrasonics Symposium (IUS), SEP 03-06, 2014, Chicago, IL