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Realizing the diamond annular groove phase masks for the mid infrared region - five years of successful process development of diamond plasma etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
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2014 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2014. Vol. 9151, 915119
Series
Proceedings of SPIE
National Category
Other Engineering and Technologies
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URN: urn:nbn:se:uu:diva-257373DOI: 10.1117/12.2055475ISI: 000354525500038ISBN: 978-0-8194-9619-5 (print)OAI: oai:DiVA.org:uu-257373DiVA: diva2:839048
Conference
Conference on Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, JUN 23-27, 2014, Montreal, CANADA
Available from: 2015-07-01 Created: 2015-07-01 Last updated: 2015-07-01Bibliographically approved

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Forsberg, PontusVargas, ErnestoKarlsson, Mikael

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