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Fabrication of short channel MOSFET:s with refractory metal gates using RF sputter etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1976 (English)In: Solid-State Electronics, ISSN 0038-1101, E-ISSN 1879-2405, Vol. 19, 17- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1976. Vol. 19, 17- p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-257790OAI: oai:DiVA.org:uu-257790DiVA: diva2:840533
Available from: 2015-07-08 Created: 2015-07-08 Last updated: 2015-07-08

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