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Laser scanning technique for the detection of resistivity and lifetime inhomogeneities in semiconductior devices or photon scanning applied to silicon for determination of bulk properties
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1978 (English)In: Physica Scripta, ISSN 0031-8949, E-ISSN 1402-4896, Vol. 18, 357- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1978. Vol. 18, 357- p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-257822OAI: oai:DiVA.org:uu-257822DiVA: diva2:840668
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2017-12-04

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CiteExportLink to record
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