Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source
2015 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 40, no 12, 2818-2821 p.Article in journal (Refereed) Published
Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.
Place, publisher, year, edition, pages
2015. Vol. 40, no 12, 2818-2821 p.
Atom and Molecular Physics and Optics
IdentifiersURN: urn:nbn:se:uu:diva-257642DOI: 10.1364/OL.40.002818ISI: 000356234300037PubMedID: 26076270OAI: oai:DiVA.org:uu-257642DiVA: diva2:840685