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Experimental and design information for calculating impedance matching networks for use in RF sputtering and plasma chemistry
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1979 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 29, no 10, 341- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1979. Vol. 29, no 10, 341- p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-257865OAI: oai:DiVA.org:uu-257865DiVA: diva2:840743
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2017-12-04

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