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Langmuir probe studies of the glow discharge in an RF sputtering system at various frequencies
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1979 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 29, 443- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1979. Vol. 29, 443- p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-257869OAI: oai:DiVA.org:uu-257869DiVA: diva2:840746
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2015-07-09

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