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The growth kinetics and properties of hard and insulating carbonaceous films grown in an RF discharge
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1979 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 60, 213- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1979. Vol. 60, 213- p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-257871OAI: oai:DiVA.org:uu-257871DiVA: diva2:840758
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2017-12-04

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