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The formation of silicides in Mo-W bilayer films on Si substrates: A Marker experiment
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1979 (English)In: Journal of Electronic Materials, ISSN 0361-5235, E-ISSN 1543-186X, Vol. 8, 641- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1979. Vol. 8, 641- p.
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-257876OAI: oai:DiVA.org:uu-257876DiVA: diva2:840764
Conference
20th Annual Electronic Materials Conference Santa Barbara, CA, USA, 1978
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2017-12-04

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