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Tantalum silicide thin films obtained by sputtering
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1981 (English)In: Journal of Electronic Materials, ISSN 0361-5235, E-ISSN 1543-186X, Vol. 10, p. 59-Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1981. Vol. 10, p. 59-
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-257880OAI: oai:DiVA.org:uu-257880DiVA, id: diva2:840770
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2017-12-04

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CiteExportLink to record
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