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Properties and coating rates of diamond-like carbon films produced by RF glow discharge of hydrocarbon gases
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1979 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 58, 117- p.Article in journal (Refereed) Published
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1979. Vol. 58, 117- p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-257913OAI: oai:DiVA.org:uu-257913DiVA: diva2:840835
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2015-07-09

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