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Observations about the formation of thin disilicide films by solid-state metal-silicon interactions: Tantalum
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1980 (English)In: Thin Film Interfaces & Interactions / [ed] Baglin and Poate, Princeton: Electrochemical Society, 1980, 290- p.Chapter in book (Refereed)
Place, publisher, year, edition, pages
Princeton: Electrochemical Society, 1980. 290- p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-257925OAI: oai:DiVA.org:uu-257925DiVA: diva2:840853
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2015-07-09

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