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Electrical defects in silicon introduced by sputtering and sputter-etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1980 (English)In: Journal of the Electrochemical Society, ISSN 0013-4651, Vol. 127, no 7, 1573- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1980. Vol. 127, no 7, 1573- p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-257977OAI: oai:DiVA.org:uu-257977DiVA: diva2:840935
Available from: 2015-07-09 Created: 2015-07-09 Last updated: 2015-07-09

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