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Stoichiometry determination of reactively sputtered titanium-silicide
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1982 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 32, no 10/11, 665- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1982. Vol. 32, no 10/11, 665- p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258010OAI: oai:DiVA.org:uu-258010DiVA: diva2:841007
Available from: 2015-07-10 Created: 2015-07-10 Last updated: 2017-12-04

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