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Selective sputter etching/deposition by non-reactive gases
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1984 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1984.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258140OAI: oai:DiVA.org:uu-258140DiVA: diva2:841132
Conference
11th Nord Semiconductor Meeting, Esbo, Finland
Available from: 2015-07-10 Created: 2015-07-10 Last updated: 2015-07-10

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CiteExportLink to record
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Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
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Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
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Output format
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