uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Sreactive sputtering of ZrN for contacts to IC-circuits
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1984 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258141OAI: oai:DiVA.org:uu-258141DiVA: diva2:841133
11th Nord Semiconductor Meeting, Esbo, Finland
Available from: 2015-07-10 Created: 2015-07-10 Last updated: 2015-07-10

Open Access in DiVA

No full text

By organisation
Solid State Electronics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

Total: 325 hits
ReferencesLink to record
Permanent link

Direct link