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Removal of RSE induced damages in silicon
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1986 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 4, no 3, 752- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1986. Vol. 4, no 3, 752- p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258189OAI: oai:DiVA.org:uu-258189DiVA: diva2:841193
Conference
AVS 32nd National Symposium, Houston, USA
Available from: 2015-07-10 Created: 2015-07-10 Last updated: 2017-12-04

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