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Silicon cavity structures fabricated with a new technique
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1986 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
1986. 286- p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258238OAI: oai:DiVA.org:uu-258238DiVA: diva2:841297
12th Nord Semiconductor Meeting, Norge
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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