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Development and process control of a metal gate CMOS process
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1986 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
1986. 68- p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258245OAI: oai:DiVA.org:uu-258245DiVA: diva2:841310
12th Nord Semiconductor Meeting, Norge
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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