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Silicon microcavities fabricated with a new technique
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1986 (English)In: Electronic Letters, Vol. 22, no 11Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1986. Vol. 22, no 11
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-258251OAI: oai:DiVA.org:uu-258251DiVA: diva2:841319
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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CiteExportLink to record
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  • apa
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