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A comparison of A1/si diffusion barriers based on TiN or ZrN
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1984 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258252OAI: oai:DiVA.org:uu-258252DiVA: diva2:841321
MIEL 84, Nis, Jugoslovakien
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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