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Spectroscopy diagnostics of phoresist in an aluminium etch plasma
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1987 (English)In: Journal of the Electrochemical Society, ISSN 0013-4651, E-ISSN 1945-7111, Vol. 134, no 8Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1987. Vol. 134, no 8
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258258OAI: oai:DiVA.org:uu-258258DiVA: diva2:841331
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2017-12-04

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