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Selective deposition of thin films by substrate argon ion bombardment
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1988 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 164, 475-480 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1988. Vol. 164, 475-480 p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258282OAI: oai:DiVA.org:uu-258282DiVA: diva2:841387
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2017-12-04

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CiteExportLink to record
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  • apa
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