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Novel three-dimensional silicon structures fabricated by anisotropic etching
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1988 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258292OAI: oai:DiVA.org:uu-258292DiVA: diva2:841399
13th Nord Semiconductor Meeting, Stockholm
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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