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Modeling of recative sputtering of titanium boride
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1989 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 172, 241-251 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1989. Vol. 172, 241-251 p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258295OAI: oai:DiVA.org:uu-258295DiVA: diva2:841415
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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