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Studies of sputtering of monoatomic overlayers applied to ion assited thin film processing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1979 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1979.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258379OAI: oai:DiVA.org:uu-258379DiVA: diva2:841457
Conference
IPAT, Geneve, Schweiz
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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CiteExportLink to record
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Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
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  • text
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