uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Studies of sputtering of monoatomic overlayers applied to ion assited thin film processing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Show others and affiliations
1979 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258379OAI: oai:DiVA.org:uu-258379DiVA: diva2:841457
IPAT, Geneve, Schweiz
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

Open Access in DiVA

No full text

By organisation
Solid State Electronics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

Total: 372 hits
ReferencesLink to record
Permanent link

Direct link