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Substrate dependent escape depths of sputtered substrate atoms through thin film overlayers
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1989 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731Article in journal (Refereed) Published
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258384OAI: oai:DiVA.org:uu-258384DiVA: diva2:841468
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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