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Substrate sputter erosion effects during a-C:H film formation in a glow discharge
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1989 (English)In: Properties and characterization of amorphous carbon / [ed] J Pouch and S Alterowitz, Trans Tech Publ , 1989, chapt 12, 291-300 p.Chapter in book (Refereed)
Place, publisher, year, edition, pages
Trans Tech Publ , 1989, chapt 12. 291-300 p.
Series
Materials Science Forum Vols 52 and 53
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258399OAI: oai:DiVA.org:uu-258399DiVA: diva2:841489
Available from: 2015-07-13 Created: 2015-07-13 Last updated: 2015-07-13

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