uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
The use of process modelling for optimum design of reactive sputtering processes
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1989 (English)In: Journal of Surface and Coatings Technology, Vol. 39/40, no 1-3, 465-474 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1989. Vol. 39/40, no 1-3, 465-474 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258407OAI: oai:DiVA.org:uu-258407DiVA: diva2:841615
Conference
16th International Conference on Metallurgical Coatings, San Diego, CA, USA
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-14

Open Access in DiVA

No full text

By organisation
Solid State Electronics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 715 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf