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The use of process modelling for optimum design of reactive sputtering processes
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1989 (English)In: Journal of Surface and Coatings Technology, Vol. 39/40, no 1-3, 465-474 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1989. Vol. 39/40, no 1-3, 465-474 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258407OAI: oai:DiVA.org:uu-258407DiVA: diva2:841615
16th International Conference on Metallurgical Coatings, San Diego, CA, USA
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-14

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