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Perpendicular walls fabricated in <100>-oriented silicon by anisotropic wet etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1989 (English)In: Sensors and materials, ISSN 0914-4935, Vol. 1, no 6, p. 313-320Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1989. Vol. 1, no 6, p. 313-320
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258408OAI: oai:DiVA.org:uu-258408DiVA, id: diva2:841616
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2017-12-04

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