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Dynamic modelling of the process control of reactive sputtering
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1989 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258418OAI: oai:DiVA.org:uu-258418DiVA: diva2:841633
11th International Vacuum Congress, 7th International Conference on Solid Surfaces, Köln, Tyskland
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-14

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