uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Electrical characterization of an ultra-shallow diffused n+p-junction in silicon
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1990 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258424OAI: oai:DiVA.org:uu-258424DiVA: diva2:841643
Nord Semiconductor Meeting, Århus, Danmark
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-14

Open Access in DiVA

No full text

By organisation
Solid State Electronics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

Total: 372 hits
ReferencesLink to record
Permanent link

Direct link