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T-DYN Monte Carlo simulations applied to ion assited thin film processes
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1991 (English)In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, ISSN 0168-9002, Vol. 359, no 60, 21-27 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1991. Vol. 359, no 60, 21-27 p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258442OAI: oai:DiVA.org:uu-258442DiVA: diva2:841670
Conference
IBMM, Knoxville , USA,1990
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-14

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