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T-DYN Monte Carlo simulations applied to ion assited thin film processes
Biersack, JP
Berg, Sören
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Nender, C
1991 (English)
In:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, ISSN 0168-9002, E-ISSN 1872-9576, Vol. 359, no 60, p. 21-27
Article in journal (Refereed) Published
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1991. Vol. 359, no 60, p. 21-27
National Category
Engineering and Technology
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URN:
urn:nbn:se:uu:diva-258442
OAI: oai:DiVA.org:uu-258442
DiVA, id:
diva2:841670
Conference
IBMM, Knoxville , USA,1990
Available from:
2015-07-14
Created:
2015-07-14
Last updated:
2017-12-04
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Solid State Electronics
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Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
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Engineering and Technology
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