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Fabrication and characterization of a silicon microvalve
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1991 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258457OAI: oai:DiVA.org:uu-258457DiVA: diva2:841692
13th International Symposium on Capillary Chromatography, Riva del Garda
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-14

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