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New shapes in (100) Si using KOH and EDP etches
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1992 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 2, 75-79 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1992. Vol. 2, 75-79 p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258460OAI: oai:DiVA.org:uu-258460DiVA: diva2:841695
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2017-12-04

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