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Pressure microsensor system using a closed-loop configuration
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1993 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1993.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258490OAI: oai:DiVA.org:uu-258490DiVA: diva2:841740
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2017-12-04

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