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An r.f. plasma jet applied to diamond, glassy carbon and silicon carbide film synthesis
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1993 (English)In: Diamond and related materials, ISSN 0925-9635, Vol. 2, 517-522 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1993. Vol. 2, 517-522 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258495OAI: oai:DiVA.org:uu-258495DiVA: diva2:841764
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-14

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