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Radio frequency plasma jet applied to coating of internal walls of narrow tubes
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1993 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 11, no 4, 1486-1490 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1993. Vol. 11, no 4, 1486-1490 p.
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-258496OAI: oai:DiVA.org:uu-258496DiVA: diva2:841765
Conference
39th National Symposium and topical conference of the AVS, Chicago, USA
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2017-12-04

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