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Effect of the space charge sheath on properties of carbon and diamond films grown in the radio frequency plasma jet
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1994 (English)In: Diamond and related materials, ISSN 0925-9635, Vol. 3, no 4-6, 528-530 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1994. Vol. 3, no 4-6, 528-530 p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258498OAI: oai:DiVA.org:uu-258498DiVA: diva2:841769
4th European Conference on Diamond, diamond-like and related materials, Portugal, paper no 9.04 1993
Available from: 2015-07-14 Created: 2015-07-14 Last updated: 2015-07-15

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